open access publication

Article, 2022

Topology optimization of MEMS resonators with target eigenfrequencies and modes

European Journal of Mechanics - A/Solids, ISSN 1873-7285, 0997-7538, Volume 91, Page 104352, 10.1016/j.euromechsol.2021.104352

Contributors

Giannini, Daniele 0000-0002-1214-2570 (Corresponding author) [1] [2] Aage, Niels 0000-0002-3042-0036 [3] Braghin, Francesco 0000-0002-0476-4118 [2]

Affiliations

  1. [1] KU Leuven
    2. [NORA names: Belgium; Europe, EU; OECD];
  2. [2] Politecnico di Milano
    3. [NORA names: Italy; Europe, EU; OECD];
  3. [3] Technical University of Denmark
    4. [NORA names: DTU Technical University of Denmark; University; Denmark; Europe, EU; Nordic; OECD]

Abstract

In this paper we present a density based topology optimization approach to the synthesis of industrially relevant MEMS resonators. The methodology addresses general resonators employing suspended proof masses or plates, where the first structural vibration modes are typically of interest and have to match specific target eigenfrequencies. As a significant practical example we consider MEMS gyroscope applications, where target drive and sense eigenfrequencies are prescribed, as well as an adequate distance of spurious modes from the operational frequency range. The 3D dynamics of the structure are analysed through Mindlin shell finite elements and a numerically efficient design procedure is obtained through the use of model order reduction techniques based on the combination of multi-point constraints, static approximations and static reduction. Manufacturability of the optimized designs is ensured by imposing a minimum length scale to the geometric features defining the layout. Using deterministic, gradient-based mathematical programming, the method is applied to the design of both single mass and tuning fork MEMS resonators. It is demonstrated that the proposed methodology is capable of meeting the target frequencies and corresponding modes fulfilling common industrial requirements.

Keywords

MEMS, MEMS resonators, Mindlin, Mindlin shell finite element, adequate distance, applications, approach, approximation, combination, constraints, density, design, design procedure, distance, driving, dynamics, efficient design procedure, eigenfrequencies, elements, features, finite element, frequency, frequency range, generalized resonance, geometric features, gyroscope applications, industrial requirements, layout, length scales, manufacturing, mass, method, methodology, minimum length scale, mode, model, model order reduction techniques, multi-point constraints, numerically, operating frequency range, optimal design, optimization approach, order reduction techniques, plate, procedure, range, reduction, reduction techniques, requirements, resonance, scale, sensing, shell finite element, single mass, static approximation, static reduction, structural vibration modes, structure, synthesis, target, target drive, target frequency, technique, topology, topology optimization, topology optimization approach, vibrational modes

Funders

  • European Research Council
  • The Velux Foundations

Data Provider: Digital Science

LINKS
-

Matching Records in NORA

SUBJECTS
+

METRICS
+